A laser measurement system for the high-precision calibration of displacement transducers

被引：29

作者：

Brand, U

Herrmann, K

机构：

[1] Phys.-Technische Bundesanstalt, 38116 Braunschweig

来源：

MEASUREMENT SCIENCE AND TECHNOLOGY | 1996年 / 7卷 / 06期

关键词：

D O I：

10.1088/0957-0233/7/6/009

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

A laser system for displacement measurements, based on the iodine-stabilized He-Ne laser wavelength standard at 633 nm, has been built up. Two resonator mirror moving systems with displacement ranges of 3 and 13 mu m respectively were investigated and the guidance deviations of the latter were corrected. An inductive displacement transducer was calibrated using the measuring laser. The overall measurement uncertainty was estimated for the calibration of the inductive transducer for a displacement length of 13 mu m.

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页码：911 / 917

页数：7

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