Antimony aperture properties on super-resolution near-field structure using different protection layers

被引:22
作者
Tominaga, J
Fuji, H
Sato, A
Nakano, T
Fukaya, T
Atoda, N
机构
[1] Natl Inst Adv Interdisciplinary Res, Adv Opt Memory Grp, Tsukuba, Ibaraki 3058562, Japan
[2] Sharp Corp, AVC Res Lab, Nara 6328567, Japan
[3] Minolta Co Ltd, Opt Technol Div, Osaka 5698503, Japan
[4] Natl Inst Mat & Chem Res, COE Project, Special Dept, Tsukuba, Ibaraki 3058565, Japan
来源
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1999年 / 38卷 / 7A期
关键词
optical memory; near-field optics; antimony thin film; high density recording;
D O I
10.1143/JJAP.38.4089
中图分类号
O59 [应用物理学];
学科分类号
摘要
Modifying a rewritable digital versatile disc (DVD) structure by Sb and SiN thin films, near-field super-resolution was performed beyond the optical diffraction limit only using a current DVD optical pickup. Using the wavelength (lambda) of 635 nm and the lens numerical aperture (NA) of 0.6, a mark size of 60 nm was recorded and detected at the double rotation speed of Compact Disc. The super-resolution properties of Sb thin films sandwiched by different dielectric layers of SiO2 and ZnS-SiO2 instead of SiN were also investigated. Super-resolution did not occur and the resolution was close to 200 nm, when using the ZnS-SiO2 layers.
引用
收藏
页码:4089 / 4093
页数:5
相关论文
共 10 条
[1]  
BEZTIG E, 1992, SCIENCE, V257, P189
[2]   Nanometer-sized phase-change recording using a scanning near-field optical microscope with a laser diode [J].
Hosaka, S ;
Shintani, T ;
Miyamoto, M ;
Hirotsune, A ;
Terao, M ;
Yoshida, M ;
Fujita, K ;
Kammer, S .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1996, 35 (1B) :443-447
[3]  
KATO M, 1997, JOINT MORIS ISOM 97, P46
[4]  
OHSHIMA M, 1992, P 4 S PHAS CHANG OPT, P12
[5]  
RANCOURT J, 1987, OPTICAL THIN FILM US, P47
[6]  
SHINTANI T, 1997, JOINT MORIS ISOM 97, P21
[7]  
TANABE T, 1997, JOINT MORIS ISOM 97, P222
[8]   Super-resolution structure for optical data storage by near-field optics [J].
Tominaga, J ;
Nakano, T ;
Atoda, N .
FAR- AND NEAR-FIELD OPTICS: PHYSICS AND INFORMATION PROCESSING, 1998, 3467 :282-286
[9]   Double optical phase transition of GeSbTe thin films sandwiched between two SiN layers [J].
Tominaga, J ;
Nakano, T ;
Atoda, N .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1998, 37 (4A) :1852-1854
[10]   An approach for recording and readout beyond the diffraction limit with an Sb thin film [J].
Tominaga, J ;
Nakano, T ;
Atoda, N .
APPLIED PHYSICS LETTERS, 1998, 73 (15) :2078-2080