Direct force balance method for atomic force microscopy lateral force calibration

被引:44
作者
Asay, DB [1 ]
Kim, SH [1 ]
机构
[1] Penn State Univ, Dept Chem Engn, University Pk, PA 16802 USA
基金
美国国家科学基金会;
关键词
D O I
10.1063/1.2190210
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
A new and simple calibration method for atomic force microscopy (AFM) is developed. This nonscanning method is based on direct force balances on surfaces with known slopes. The lateral force calibration is performed during force-distance measurements for normal force calibration. This method requires a substrate with known slopes, the z motion of the piezocalibrated, and the normal spring constant known. This technique determines not only the lateral detector sensitivity (N/V) but also the detector offset (V/m) and off-centering angle (alpha) for asymmetric cantilever-tip geometries. Because it is nonscanning, the AFM cantilever can be calibrated without dulling the tip. (c) 2006 American Institute of Physics.
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页数:9
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