Morphology identification of the thin film phases of vacuum evaporated pentacene on SIO2 substrates

被引:271
作者
Bouchoms, IPM
Schoonveld, WA
Vrijmoeth, J
Klapwijk, TM
机构
[1] Univ Groningen, Dept Appl Phys, NL-9747 AG Groningen, Netherlands
[2] Univ Groningen, Ctr Mat Sci, NL-9747 AG Groningen, Netherlands
关键词
evaporation; sublimation; atomic force microscopy; X-ray diffraction; polycrystalline thin films;
D O I
10.1016/S0379-6779(99)00050-8
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
We identify, using Atomic Force Microscopy and theta-2 theta X-ray Diffraction techniques, the morphology of the two crystallographic phases commonly observed in vacuum evaporated pentacene thin films on SiO2 substrates used for thin film transistor applications. One phase, a substrate induced thin film phase, forms directly onto the SiO2 substrate and constitutes a layer consisting of strongly faceted grains with a step height between terraces of 15.5 Angstrom. Above a critical thickness of this thin film phase, lamellar structures are found with increasing fraction when the film thickness is increased. These structures are identified as the second phase with a vertical periodicity of 14.5 Angstrom corresponding to the pentacene triclinic bulk phase. Furthermore, we find maximum sized single crystal domains(similar to 15 mu m in diameter), consisting of several micrometer sized uniformly oriented grains of the thin film phase, at a substrate temperature of 80 degrees C and a deposition rate of 0.08 nm/s. (C) 1999 Elsevier Science S.A. All rights reserved.
引用
收藏
页码:175 / 178
页数:4
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