Development and application of micromachined Pd/SnO2 gas sensors with zeolite coatings

被引：48

作者：

Vilaseca, M. ^{[1
]}

Coronas, J. ^{[1
]}

Cirera, A. ^{[2
]}

Cornet, A. ^{[2
]}

Morante, J. R. ^{[2
]}

Santamaria, J. ^{[1
]}

机构：

[1] Univ Zaragoza, Nanosci Inst Aragon, Dept Chem & Environm Engn, E-50009 Zaragoza, Spain

[2] Univ Barcelona, Dept Elect, EME XARMAE IN2UB, E-08028 Barcelona, Spain

来源：

SENSORS AND ACTUATORS B-CHEMICAL | 2008年 / 133卷 / 02期

关键词：

microsensors; zeolite coatings; SnO2; gas sensor selectivity;

D O I：

10.1016/j.snb.2008.03.002

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

Zeolite A (LTA)-coatecl micromachined sensors have been prepared and used in the sensing of individual gases (H-2, CH4, C2H5OH, C3H8 and CO, in the 10-1000 ppm range) and gas mixtures. Unlike previous Works with conventional sensors, a hydrothermal synthesis was not Used to prepare a zeolite film. Instead, a zeolite coating was formed on top of the Pd/SnO2 surface by microdropping from a zeolite suspension. In spite of this, the response of the sensor with zeolite is significantly different from that of unmodified sensors, and essentially reproduces the performance of zeolite-coated conventional sensors. By avoiding the use of a hydrothermal synthesis the integrity of the sensor is better preserved, and the resulting non-continuous zeolite film has the added advantage of a strong reduction in response times. (C) 2008 Elsevier B.V. All rights reserved.

引用

页码：435 / 441

页数：7

共 27 条

[1] Highly selective sensor to CH4 in presence of CO and ethanol using LaCoO3 perovskite filter with Pt/SnO2 [J].

Ajami, S. ;

Mortazavi, Y. ;

Khodadadi, A. ;

Pourfayaz, F. ;

Mohajerzadeh, S. .

SENSORS AND ACTUATORS B-CHEMICAL, 2006, 117 (02) :420-425

[2] ZEOLITES AS SENSITIVE MATERIALS FOR DIELECTRIC GAS SENSORS [J].

ALBERTI, K ;

FETTING, F .

SENSORS AND ACTUATORS B-CHEMICAL, 1994, 21 (01) :39-50

[3] Mesoporous nanoparticle TiO2 thin films for conductometric gas sensing on microhotplate platforms [J].

Benkstein, KD ;

Semancik, S .

SENSORS AND ACTUATORS B-CHEMICAL, 2006, 113 (01) :445-453

[4] Deposition on micromachined silicon substrates of gas sensitive layers obtained by a wet chemical route:: a CO/CH4 high performance sensor [J].

Cerdà, J ;

Cirera, A ;

Vilà, A ;

Cornet, A ;

Morante, JR .

THIN SOLID FILMS, 2001, 391 (02) :265-269

[5] CO-CH4 selectivity enhancement by in situ Pd-catalysed microwave SnO2 nanoparticles for gas detectors using active filter [J].

Cirera, A ;

Cabot, A ;

Cornet, A ;

Morante, JR .

SENSORS AND ACTUATORS B-CHEMICAL, 2001, 78 (1-3) :151-160

[6] Gas concentration estimation in ternary mixtures with room temperature operating sensor array using tapped delay architectures [J].

De Vito, Saverio ;

Castaldo, Anna ;

Loffredo, Fausta ;

Massera, Ettore ;

Polichetti, Tiziana ;

Nasti, Lvana ;

Vacca, Paolo ;

Quercia, Luigi ;

Di Francia, Girolamo .

SENSORS AND ACTUATORS B-CHEMICAL, 2007, 124 (02) :309-316

[7] MEMS-based hydrogen gas sensors [J].

DiMeo, Frank, Jr. ;

Chen, Ing-Shin ;

Chen, Philip ;

Neuner, Jeffrey ;

Roerhl, Andreas ;

Welch, James .

SENSORS AND ACTUATORS B-CHEMICAL, 2006, 117 (01) :10-16

[8] Micromachined nanocrystalline SnO2 chemical gas sensors for electronic nose [J].

Gong, JW ;

Chen, QF ;

Fei, WF ;

Seal, S .

SENSORS AND ACTUATORS B-CHEMICAL, 2004, 102 (01) :117-125

[9] SNO2 SENSORS - CURRENT STATUS AND FUTURE-PROSPECTS [J].

GOPEL, W ;

SCHIERBAUM, KD .

SENSORS AND ACTUATORS B-CHEMICAL, 1995, 26 (1-3) :1-12

[10] Selective impedance based gas sensors for hydrocarbons using ZSM-5 zeolite films with chromium(III)oxide interface [J].

Hagen, G. ;

Dubbe, A. ;

Rettig, F. ;

Jerger, A. ;

Birkhofer, Th. ;

Mueller, R. ;

Plog, C. ;

Moos, R. .

SENSORS AND ACTUATORS B-CHEMICAL, 2006, 119 (02) :441-448

← 1 2 3 →