Optical constants of crystalline WO3 deposited by magnetron sputtering

被引：25

作者：

DeVries, MJ ^{[1
]}

Trimble, C

Tiwald, TE

Thompson, DW

Woollam, JA

Hale, JS

机构：

[1] Univ Nebraska, Ctr Microelect & Opt Mat Res, Lincoln, NE 68588 USA

[2] Univ Nebraska, Dept Elect Engn, Lincoln, NE 68588 USA

[3] JA Woollam Co Inc, Lincoln, NE 68508 USA

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1999年 / 17卷 / 05期

关键词：

D O I：

10.1116/1.581958

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

Crystalline WO3-x is an infrared (IR) electrochromic material having possible applications in satellite thermal control and IR switches. Optical constants of electrochromic materials change upon ion intercalation, usually with H+ or Li+. Of primary concern for device design are the optical constants in both the intercalated and deintercalated states. In situ and ex situ ellipsometric data are used to characterize both the deposition process and the optical constants of the films. Ex situ data from a UV-Vis-NIR ellipsometer are combined with data from a mid-infrared Fourier-transform-infrared-based ellipsometer to provide optical constants over a spectral range of 0.031-6.1 eV. (C) 1999 American Vacuum Society. [S0734-2101(99)04905-2].

引用

页码：2906 / 2910

页数：5

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