Epitaxial diamond growth on sapphire in an oxidizing environment

被引:103
作者
Yoshimoto, M [1 ]
Yoshida, K
Maruta, H
Hishitani, Y
Koinuma, H
Nishio, S
Kakihana, M
Tachibana, T
机构
[1] Tokyo Inst Technol, Mat & Struct Lab, Yokohama, Kanagawa 2268503, Japan
[2] Kobe Steel Ltd, Elect Informat & Technol Lab, Nish Ku, Kobe, Hyogo 6512271, Japan
关键词
D O I
10.1038/20653
中图分类号
O [数理科学和化学]; P [天文学、地球科学]; Q [生物科学]; N [自然科学总论];
学科分类号
07 ; 0710 ; 09 ;
摘要
Thin films of diamond are of interest for technological applications such as hard coatings, heat sinks in electronic devices and miniaturized vacuum diodes(1-4). They are typically produced by chemical vapour deposition, and the presence of atomic hydrogen has been considered crucial for the growth of the diamond crystals(5-9). Some studies have claimed diamond film growth in a hydrogen-free environment(10-13), but questions remained about ( the growth conditions in those cases, Here we report the nucleation and growth of diamond by vapour deposition in a hydrogen-free, pure oxygen environment to form crystals that are heteroepitaxially aligned on a single-crystal sapphire substrate. In other words, we are able to achieve diamond growth under conditions where the oxidative 'etching' of carbon must compete with its deposition. By choosing a temperature range that results in preferential oxidation of non-diamond (graphitic) carbon species to that of diamond, we are able to achieve the accumulation of diamond.
引用
收藏
页码:340 / 342
页数:3
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