Simulation of reflective notching with TEMPEST

Reflective notching from projection printing a narrow feature over a reflective topography was simulated with the 3D electromagnetic simulation program TEMPEST[1]. Various topographical and optical parameters were varied to determine their effect on the reflective notching and to gain insight into the mechanism of reflective notching. It was determined that corner angles in the topography and anti-reflection coating use are important parameters while resist surface angle and polarization are not.