Micro-imaging system using scanning DC-SQUID microscope

被引：68

作者：

Morooka, T ^{[1
]}

Nakayama, S ^{[1
]}

Odawara, A ^{[1
]}

Ikeda, M ^{[1
]}

Tanaka, S ^{[1
]}

Chinone, K ^{[1
]}

机构：

[1] Seiko Instruments Inc, Matsudo, Chiba 2702222, Japan

来源：

IEEE TRANSACTIONS ON APPLIED SUPERCONDUCTIVITY | 1999年 / 9卷 / 02期

关键词：

D O I：

10.1109/77.783782

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A micro-imaging system in a low temperature environment has been developed for the study of superconducting films and magnetic films and for the inspection of superconducting integrated circuits. The system consists of a micro DC-SQUID, a cryostat, a precise scanning stage, and a computer. Two different types of micro DC-SQUIDs were designed. One was a magnetometer (Bz) with a one-turn pick-up coil with a diameter of 10 mu m, and the other was a gradiometer (dBz/dx) with a planar first-order derivative pick-up coil. Each micro DC-SQUID was integrated on a 3mm x 3mm Si chip using thin Nb film fabrication technology. Preliminary experiments were made using the system and several magnetic images were obtained. We present observations of a thin superconducting Nb film pattern by applying the Meissner screening and the magnetic domains of a thin garnet ((YBi)(3)(FeAl)(5)O-12) film.

引用

页码：3491 / 3494

页数：4

共 10 条

[1] Magnetic field maps of YBCO thin films obtained by scanning SQUID microscopy for HTSC microelectronics [J].