Shape memory microactuators

Since shape memory alloys have been recognized to be a smart material, actuator elements based on the shape memory effect have been increasingly used in various fields of application. This paper reports on the design and fabrication of several silicon microactuators driven by shape memory elements, namely mechanical microgrippers, microvalves and artificial muscle actuators. The actuators were designed as compliant mechanisms and fabricated by silicon micromachining. For the processing of the shape memory elements a new laser assisted technology was applied. The shape memory elements were connected to the silicon mechanisms either by positive joining or by adhesive bonding.