Imposed layer-by-layer growth by pulsed laser interval deposition

被引:115
作者
Koster, G [1 ]
Rijnders, GJHM [1 ]
Blank, DHA [1 ]
Rogalla, H [1 ]
机构
[1] Univ Twente, Dept Appl Phys, Low Temp Div, NL-7500 AE Enschede, Netherlands
关键词
D O I
10.1063/1.123235
中图分类号
O59 [应用物理学];
学科分类号
摘要
Pulsed laser deposition has become an important technique to fabricate novel materials. Although there is the general impression that, due to the pulsed deposition, the growth mechanism differs partially from continuous physical and chemical deposition techniques, it has hardly been used. Here, we will introduce a growth method, based on a periodic sequence: fast deposition of the amount of material needed to complete one monolayer followed by an interval in which no deposition takes place and the film can reorganize. This makes it possible to grow in a layer-by-layer fashion in a growth regime (temperature, pressure) where otherwise island formation would dominate the growth. (c) 1999 American Institute of Physics. [S0003-6951(99)02424-9].
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收藏
页码:3729 / 3731
页数:3
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