Deconvolution method for two-dimensional spatial-response mapping of lithographic infrared antennas

被引:32
作者
Alda, J
Fumeaux, C
Codreanu, I
Schaefer, JA
Boreman, GD
机构
[1] Univ Cent Florida, Sch Opt, Orlando, FL 32816 USA
[2] Univ Complutense Madrid, Sch Opt, Madrid 28037, Spain
关键词
D O I
10.1364/AO.38.003993
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
The spatial impulse response of antenna-coupled infrared detectors with dimensions comparable with the wavelength is obtained from a two-dimensional scan of a tightly focused CO2-laser beam. The method uses an experimental setup with submicrometer resolution and an iterative deconvolution algorithm. The measured spatial response is compared with numerically computed near-field distributions of a dipole antenna, with good agreement. (C) 1999 Optical Society of America.
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页码:3993 / 4000
页数:8
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