Study on TiO2-doped ZnO thick film gas sensors enhanced by UV light at room temperature

被引：83

作者：

Gui, Yanghai ^{[1
]}

Li, Shumian ^{[1
]}

Xu, Jiaqiang ^{[1
]}

Li, Chao ^{[1
]}

机构：

[1] Zhengzhou Univ Light Ind, Henan Prov Key Lab Surface & Interfaces Sci, Zhengzhou 450002, Peoples R China

来源：

MICROELECTRONICS JOURNAL | 2008年 / 39卷 / 09期

关键词：

ZnO; TiO2; UV light; gas sensing; room temperature;

D O I：

10.1016/j.mejo.2008.01.052

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The gas-sensing properties of titanium oxide (TiO2)-doped zinc oxide (ZnO) thick film sensor specimens to typical ethanol vapor under UV light activation at room temperature have been investigated. Zinc nanoparticles were mixed with commercial TiO2 in various weight percentage (0%, 1%, 5%, and 10%) and sintered at 650 degrees C for 2h to prepare the thick film sensors. The sensors exhibit better photosensitivity and gas sensitivity to ethanol analyte. The response and recovery times are within 8s. TiO2 doping can improve the sensors stability and reproducibility. X-ray diffraction (XRD) and scanning electron microscopy (SEM) characterization of the film materials revealed that Zn2TiO4 and TiO2 phases hindered the rod- or needle-like structure growth and subsequently affected the gas sensitivity. UV absorption spectra of the sensing film material completely dispersed in ethanol solution exhibited that the red shifts were caused with the doping of a small amount of TiO2 into ZnO then blue shift was caused with higher TiO2 level. The results of the UV spectra are well consistent with the photosensitive performance. The maximum sensitivity can be achieved by doping the amount of TiO2 (5 wt%). (C) 2008 Elsevier Ltd. All rights reserved.

引用

页码：1120 / 1125

页数：6

共 18 条

[1] Low temperature selective NO2 sensors by nanostructured fibres of ZnO [J].