From ozone generators to flat television screens: history and future potential of dielectric-barrier discharges

被引:338
作者
Kogelschatz, U [1 ]
Eliasson, B [1 ]
Egli, W [1 ]
机构
[1] ABB Corp Res Ltd, CH-5405 Baden, Switzerland
关键词
D O I
10.1351/pac199971101819
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
Dielectric-barrier discharges (silent discharges) combine the ease of atmospheric pressure operation with nonequilibrium plasma conditions suited for many plasma chemical processes. In most gases at this pressure the discharge consists of a large number of randomly distributed short-lived microdischarges. Their properties are discussed in detail. Traditionally mainly used for industrial ozone production, dielectric-barrier discharges have found additional large volume applications in surface treatment, high-power CO2 lasers, excimer ultraviolet lamps, pollution control and, most recently, also in large-area flat plasma display panels. Future applications may include their use in greenhouse gas control technologies. Historical aspects, properties and applications of dielectric-barrier discharges are discussed.
引用
收藏
页码:1819 / 1828
页数:10
相关论文
共 95 条
[1]  
Andrews T., 1860, PHIL T R SOC LOND, P113
[2]  
BECKER H, 1923, WISS VEROEFF SIEMENS, V3, P243
[3]  
Becker H., 1920, WISS VEROEFF SIEMENS, V1, P76
[4]   DIRECT PHOTO-DEPOSITION OF SILICON DIOXIDE FILMS USING A XENON EXCIMER LAMP [J].
BERGONZO, P ;
KOGELSCHATZ, U ;
BOYD, IW .
APPLIED SURFACE SCIENCE, 1993, 69 (1-4) :393-397
[5]   LOW-PRESSURE PHOTODEPOSITION OF SILICON-NITRIDE FILMS USING A XENON EXCIMER LAMP [J].
BERGONZO, P ;
BOYD, IW .
APPLIED PHYSICS LETTERS, 1993, 63 (13) :1757-1759
[6]  
BITZER DL, 1966, AFIPS C P, V29, P541
[7]   New large area ultraviolet lamp sources and their applications [J].
Boyd, IW ;
Zhang, JY .
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1997, 121 (1-4) :349-356
[8]  
BOYD IW, 1995, MATER SCI FORUM, V173-, P81, DOI 10.4028/www.scientific.net/MSF.173-174.81
[9]   Simulations of self-organized filaments in a dielectric barrier glow discharge plasma [J].
Brauer, I ;
Punset, C ;
Purwins, HG ;
Boeuf, JP .
JOURNAL OF APPLIED PHYSICS, 1999, 85 (11) :7569-7572
[10]   MICRODISCHARGES IN AIR-FED OZONIZERS [J].
BRAUN, D ;
KUCHLER, U ;
PIETSCH, G .
JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1991, 24 (04) :564-572