Chemical vapour infiltration of pyrocarbon .1. Some kinetic considerations

被引:49
作者
Benzinger, W [1 ]
Huttinger, KJ [1 ]
机构
[1] UNIV KARLSRUHE, INST CHEM TECH, D-76128 KARLSRUHE, GERMANY
关键词
chemical vapour infiltration; kinetics; pyrocarbon;
D O I
10.1016/S0008-6223(96)00117-0
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
Chemical vapour infiltration of pyrocarbon is analysed with respect to (i) the nature of the hydrocarbon (carbon source), (ii) the pyrolysis chemistry and kinetics of homogeneous gas phase reactions, (iii) the kinetics of heterogeneous pyrocarbon deposition reactions, (iv) pore diffusion in the Fick and Knudsen regime, (v) total pressure, (vi) initial partial pressure of the hydrocarbon, (vii) inert diluent gases and (viii) hydrogen, both as reaction product and non-inert diluent gas. The analysis shows aspects for the optimization of chemical vapour infiltration, and it clearly shows methane to be the ideal hydrocarbon for various reasons. Copyright (C) 1996 Elsevier Science Ltd
引用
收藏
页码:1465 / 1471
页数:7
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