Deterministic positioning of three-dimensional structures on a substrate by film growth

被引：9

作者：

McCarty, KF ^{[1
]}

机构：

[1] Sandia Natl Labs, Livermore, CA 94550 USA

来源：

NANO LETTERS | 2006年 / 6卷 / 04期

关键词：

D O I：

10.1021/nl060030l

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

A process to fabricate three-dimensional crystalline structures at controlled locations on a substrate during film growth and annealing is demonstrated. Low-energy electron microscopy reveals that silver is transported to regions on a tungsten surface with closely spaced atomic steps. By controlling the substrate topography using a focused ion beam to machine small holes, this general mechanism produces an array of cylinders as a silver film dewets the substrate.

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页码：858 / 861

页数：4

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