The structure and properties of chromium diboride coatings deposited by pulsed magnetron sputtering of powder targets

被引:40
作者
Audronis, M
Kelly, PJ
Arnell, RD
Leyland, A
Matthews, A
机构
[1] Univ Sheffield, Dept Mat Engn, Sheffield S1 3JD, S Yorkshire, England
[2] Manchester Metropolitan Univ, Surface Engn Grp, Manchester M1 5GD, Lancs, England
[3] Univ Salford, Mat Res Inst, Salford M5 4WT, Lancs, England
基金
英国工程与自然科学研究理事会;
关键词
chromium diboride; pulsed magnetron sputtering; pulsed biasing; powder targets;
D O I
10.1016/j.surfcoat.2005.08.022
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
Metal boride coatings are attracting increased interest, due to the fact that they combine high hardness with good wear and corrosion resistance. These coatings are often deposited by the sputtering of hot-pressed or sintered ceramic targets. However, targets of this nature can be prone to cracking and, since the user is limited to a single composition per target, do not offer the opportunity to readily vary film stoichiometry. Titanium and zirconium borides have been widely studied; however, chromium diboride is recognised as offering superior performance in corrosive-wear environments. In this study, therefore, CrB2 coatings were deposited by the pulsed magnetron sputtering of loosely packed blended powder targets. This work was carried out in a deposition system specifically designed for the use of powder targets, and the effectiveness of this approach has been previously demonstrated through the production of a number of different multi-component coating materials. The CrB2 coatings deposited exhibit extremely dense, defect-free, crystalline structures with high hardness (>30 GPa) and good corrosion resistant properties. This paper discusses the dependence of structure, mechanical properties and corrosion behaviour of such coatings on the DC pulsed plasma treatment conditions chosen. (c) 2005 Elsevier B.V. All rights reserved.
引用
收藏
页码:1366 / 1371
页数:6
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