Synthesis and characterization of (beta-diketonato)silver vinyltriethylsilane compounds and their application to CVD of silver thin films. Crystal structure of the (2,2-dimethyl-6,6,7,7,8,8,8-heptafluoro-3,5-octanedionato)silver vinyltriethylsilane dimer

被引:43
作者
Chi, KM [1 ]
Chen, KH [1 ]
Peng, SM [1 ]
Lee, GH [1 ]
机构
[1] NATL TAIWAN UNIV,DEPT CHEM,TAIPEI,TAIWAN
关键词
D O I
10.1021/om960013e
中图分类号
O61 [无机化学];
学科分类号
070301 ; 081704 ;
摘要
New silver complexes of alkenes of empirical formula (beta-diketonato)Ag(VTES), where beta-diketonato = 1,1,1,5,5,5-hexafluoro-2,4-pentanedionato (hfac), (1),1,1,1-trifluoro-2,4-pentanedionato (hfac) (2), and 2,2-dimethyl-6,6,7,7,8,8,8-heptafluoro-3,5-octanedionato (fod) (3) and VTES = vinyltriethylsilane, were prepared from reactions of Ag2O with beta-diketones in the presence of VTES. All compounds were characterized by elemental analyses and H-1, C-13, and F-19 NMR and IR spectra. The crystal structure of compound 3 determined by X-ray diffraction analysis showed a dimeric silver species with coordination of the C=C double bond of VTES, two oxygen atoms of a chelating fod ligand, and the methine C atom of another fod in the solid state. Hot-wall chemical vapor deposition experiments revealed that compound 1 is suitable as a precursor to deposit pure silver films in the temperature range 160-280 degrees C.
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页码:2575 / 2578
页数:4
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