Theory of high-NA imaging in homogeneous thin films

被引:170
作者
Flagello, DG
Milster, T
Rosenbluth, AE
机构
[1] UNIV ARIZONA,CTR OPT SCI,TUCSON,AZ 85721
[2] IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598
来源
JOURNAL OF THE OPTICAL SOCIETY OF AMERICA A-OPTICS IMAGE SCIENCE AND VISION | 1996年 / 13卷 / 01期
关键词
D O I
10.1364/JOSAA.13.000053
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
A description is given of a modeling technique that is used to explore three-dimensional image distributions formed by high numerical aperture (NA > 0.6) lenses in homogeneous, isotropic, linear, and source-free thin films. The approach is based on a plane-wave decomposition in the exit pupil. Factors that are due to polarization, aberration, object transmittance, propagation, and phase terms are associated with each planewave component. These are combined with a modified thin-film matrix technique in a derivation of the total held amplitude at each point in the film by a coherent vector sum over all plane waves. One then calculates the image distribution by squaring the electric-field amplitude. The model is used to show how asymmetries present in the polarized image change with the influence of a thin film. Extensions of the model to magneto-optic thin films are discussed. (C) 1996 Optical Society of America
引用
收藏
页码:53 / 64
页数:12
相关论文
共 32 条
  • [1] Chipman R.A., 1987, THESIS U ARIZONA TUC
  • [2] CHIPMAN RA, 1989, P SOC PHOTO-OPT INST, V1746, P62
  • [3] Debye P, 1909, ANN PHYS-BERLIN, V30, P755
  • [4] MODELING PROJECTION PRINTING OF POSITIVE PHOTORESISTS
    DILL, FH
    NEUREUTHER, AR
    TUTTLE, JA
    WALKER, EJ
    [J]. IEEE TRANSACTIONS ON ELECTRON DEVICES, 1975, ED22 (07) : 456 - 464
  • [5] LITHOGRAPHIC TOLERANCES BASED ON VECTOR DIFFRACTION THEORY
    FLAGELLO, DG
    ROSENBLUTH, AE
    [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1992, 10 (06): : 2997 - 3003
  • [6] FLAGELLO DG, 1992, P SOC PHOTO-OPT INS, V1625, P246, DOI 10.1117/12.58952
  • [7] FLAGELLO DG, 1991, MICROCIRCUIT ENG, V17, P105
  • [8] FLAGELLO DG, 1993, THESIS U ARIZONA TUC
  • [9] FLAGELLO DG, 1993, OPTICAL LASER MICROL, V1927, P395
  • [10] Gaskill J.D., 1978, Linear Systems, Fourier Transforms, and Optics