共 32 条
- [1] Chipman R.A., 1987, THESIS U ARIZONA TUC
- [2] CHIPMAN RA, 1989, P SOC PHOTO-OPT INST, V1746, P62
- [3] Debye P, 1909, ANN PHYS-BERLIN, V30, P755
- [5] LITHOGRAPHIC TOLERANCES BASED ON VECTOR DIFFRACTION THEORY [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1992, 10 (06): : 2997 - 3003
- [6] FLAGELLO DG, 1992, P SOC PHOTO-OPT INS, V1625, P246, DOI 10.1117/12.58952
- [7] FLAGELLO DG, 1991, MICROCIRCUIT ENG, V17, P105
- [8] FLAGELLO DG, 1993, THESIS U ARIZONA TUC
- [9] FLAGELLO DG, 1993, OPTICAL LASER MICROL, V1927, P395
- [10] Gaskill J.D., 1978, Linear Systems, Fourier Transforms, and Optics