Ultraviolet Raman characterisation of diamond-like carbon films

被引：45

作者：

Adamopoulos, G ^{[1
]}

Gilkes, KWR

Robertson, J

Conway, NMJ

Kleinsorge, BY

Buckley, A

Batchelder, DN

机构：

[1] Univ Cambridge, Dept Engn, Cambridge CB2 1PZ, England

[2] Univ E Anglia, Sch Phys, Norwich NR4 7TJ, Norfolk, England

[3] Univ Leeds, Dept Phys & Astron, Leeds LS2 9JT, W Yorkshire, England

来源：

关键词：

diamond-like carbon; Raman; sp(3) bonding; ta-C : H;

D O I：

10.1016/S0925-9635(98)00430-0

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Diamond-like carbon (DLC) films with a range of sp(3) fractions have been examined by ultraviolet (UV) spectroscopy with 244 nm excitation. The UV Raman spectra of both hydrogenated and unhydrogenated films show the G peak near 1600 cm(-1) and a broad peak around 1200 cm(-1), which is attributed to C-C stretching vibrations of sp(3) sites. It is found that the ratio of the intensities of the C peak and the 1200 cm(-1) peak follows a universal dependence with the sp(3) content in both hydrogenated and unhydrogenated DLCs. This can be used for non-destructive evaluation of the sp(3) content of any DLC film. (C) 1999 Elsevier Science S.A. All rights reserved.

引用

页码：541 / 544

页数：4

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