Increasing the resistivity of electrodeposited high BS CoNiFe thin film

被引:27
作者
Yokoshima, T [1 ]
Kaseda, M [1 ]
Yamada, M [1 ]
Nakanishi, T [1 ]
Momma, T [1 ]
Osaka, T [1 ]
机构
[1] Waseda Univ, Sch Sci & Engn, Dept Appl Chem, Kagami Mem Lab Mat Sci & Technol,Shinjuku Ku, Tokyo 1698555, Japan
基金
日本学术振兴会;
关键词
soft magnetic thin film; high B-s; high resistivity; electrodeposition;
D O I
10.1109/20.800871
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
In order to increase the resistivity of electrodeposited high B-S CoNiFe thin film, the effect of an organic additive such as diethylenetriamine (DET) added to the plating bath was investigated. The values of rho and H-C were gradually increased as a function of DET concentration. The desirable soft magnetic CoNiFe thin film with rho = 25-90 mu Omega-cm under the conditions of B-S > 1.9 T and H-C < 2.5 Oe was developed as function of carbon in the deposited films. Additionally, the high resistivity CoNiFe thin film with rho = 130 mu Omega-cm was established under the conditions of B-S = 1.7 T and H-C < 6 Oe.
引用
收藏
页码:2499 / 2501
页数:3
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