Rapid surface topography using a tapping mode atomic force microscope

被引:10
作者
Ookubo, N [1 ]
Yumoto, S [1 ]
机构
[1] NEC Corp Ltd, Funct Mat Res Labs, Miyamae Ku, Kawasaki, Kanagawa 216, Japan
关键词
D O I
10.1063/1.123783
中图分类号
O59 [应用物理学];
学科分类号
摘要
In an atomic force microscope (AFM), it is possible to scan at high speeds without sacrificing resolution if the imaging is accomplished by combining the rapidly varying signal from the vibrating cantilever, which indicates the detailed surface features, with the more slowly varying feedback control signal to the piezotube. Scanning speed in this case is limited by the fundamental resonance of the cantilever-not, as in conventional AFM, by the feedback bandwidth-and about 10 s is required to image a surface area of 21 mu m(2) for 512X512 scanning points. (C) 1999 American Institute of Physics. [S0003-6951(99)04110-8].
引用
收藏
页码:2149 / 2151
页数:3
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