Estimation of the optical constants and the thickness of thin films using unconstrained optimization

被引:237
作者
Birgin, EG
Chambouleyron, I
Martínez, JM
机构
[1] IMECC UNICAMP, Dept Appl Math, BR-13091970 Campinas, SP, Brazil
[2] IPGW UNICAMP, Dept Appl Phys, BR-13083970 Campinas, SP, Brazil
基金
巴西圣保罗研究基金会;
关键词
unconstrained minimization; spectral gradient method; optical constants; thin films;
D O I
10.1006/jcph.1999.6224
中图分类号
TP39 [计算机的应用];
学科分类号
081203 ; 0835 ;
摘要
The problem of estimating the thickness and the optical constants of thin Alms using transmission data only is very challenging from the mathematical point of view and has a technological and an economic importance, In many cases it represents a very ill-conditioned inverse problem with many local-nonglobal solutions. In a recent publication we proposed nonlinear programming models for solving this problem, Well-known software for linearly constrained optimization was used with success for this purpose, Ln this paper we introduce an unconstrained formulation of the nonlinear programming model and we solve the estimation problem using a method based on repeated calls to a recently introduced unconstrained minimization algorithm, Numerical experiments on computer-generated Alms show that the new procedure is reliable, (C) 1999 Academic Press.
引用
收藏
页码:862 / 880
页数:19
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