Wetting of copper on α-Al2O3 surfaces depending on the orientation and oxygen partial pressure

被引:26
作者
Alber, U
Müllejans, H
Rühle, M
机构
[1] Max Planck Inst Met Forsch, D-70174 Stuttgart, Germany
[2] Univ Calif Santa Barbara, Mat Res Lab, Santa Barbara, CA 93106 USA
关键词
interfaces between Cu and single crystalline alpha-Al2O3; sessile drop technique; spatial difference (SD) method;
D O I
10.1016/S0968-4328(99)00013-X
中图分类号
TH742 [显微镜];
学科分类号
摘要
The influence of oxygen partial pressure and misorientation on the chemistry and bonding at interfaces between Cu and single crystalline alpha-Al2O3 was studied by analytical electron microscopy with nanoscale resolution. The interfaces were prepared by the sessile drop technique, i.e. by melting pure Cu (99.99%) in a furnace onto alpha-Al2O3 plates. We investigated the chemistry and bonding at the interfaces for two orientations of the single crystalline alpha-Al2O3 substrates with two different surface planes, the basal (B-) plane, (0001), alpha-Al2O3B, and the rhombohedral (R-) plane, (10 (1) over bar 2), alpha-Al2O3R. The oxygen partial pressure (p(Ox)) in the furnace was varied between 10(-4) and 10(-15) bar. This was controlled using a solid state electrolyte cell instrument. Spatially resolved (SR) electron energy-loss spectroscopy (EELS) in a dedicated scanning transmission electron microscope (STEM) was applied to characterize the chemistry and the electronic structure at the interfaces. At low oxygen partial pressure (p(Ox) < 3 x 10(-11) bar), all interfaces fractured during transmission electron microscopy (TEM) specimen preparation, independently of the alpha-Al2O3 surfaces (B- or R-plane). At higher oxygen partial pressures (p(Ox) = [1.5 x 10(-10)...7.8 x 10(-4)] bar) the successful TEM specimen preparation indicates stronger bonding across the interfaces. No changes in the electronic structure at the Cu/alpha-Al2O3B interfaces as compared to the bulk were found by spatially resolved EELS while the electronic structure at the Cu/alpha-Al2O3R interfaces changed strongly. These differences are attributed to the reconstruction of the alpha-Al2O3B plane being neutral compared to the relaxation of the alpha-Al2O3R-plane which is charged and can therefore form ionic bonds with the Cu. (C) 1999 Published by Elsevier Science Ltd. All rights reserved.
引用
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页码:101 / 108
页数:8
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