Thick-film resonant piezo-layers as new gravimetric sensors

被引：37

作者：

Ferrari, V

Marioli, D

Taroni, A

机构：

[1] Dept. of Electronics for Automation, Faculty of Engineering, University of Brescia, I 25123 Brescia

来源：

MEASUREMENT SCIENCE AND TECHNOLOGY | 1997年 / 8卷 / 01期

关键词：

D O I：

10.1088/0957-0233/8/1/007

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Resonant piezo-layers (RPLs) manufactured in thick-film technology are proposed as highly sensitive gravimetric sensors. RPLs rely on a PZT-based screen printable paste which is used for the fabrication of planar elements on alumina substrates behaving as thickness-made resonators. When operated at resonance, these elements are sensitive to a mass load applied on their free moving face, working as resonant microbalances with a frequency output, reaching a mass sensitivity of 114 kHz mg(-1). This paper describes the paste preparation, background theory, frequency-tracking oscillator and the characterization of the sensors and anticipates their application in sensing arrays for chemical measurements.

引用

页码：42 / 48

页数：7

共 16 条

[1]

[Anonymous], 1994, THICK FILM SENSORS

[2] ADVANCES IN HIGH-Q PIEZOELECTRIC RESONATOR MATERIALS AND DEVICES [J].