Black nonreflecting silicon surfaces for solar cells

被引:394
作者
Koynov, S [1 ]
Brandt, MS [1 ]
Stutzmann, M [1 ]
机构
[1] Tech Univ Munich, Walter Schottky Inst, D-85748 Garching, Germany
关键词
D O I
10.1063/1.2204573
中图分类号
O59 [应用物理学];
学科分类号
摘要
We present a wet chemical process for nanoscale texturing of Si surfaces, which results in an almost complete suppression of the reflectivity in a broad spectral range, leading to black Si surfaces. The process affects only the topmost 200-300 nm of the material and is independent of the surface orientation and doping. Thus, it can be applied to various structural forms of bulk silicon (single, poly-, or multicrystalline) as well as to thin Si films (amorphous or microcrystalline). The optical properties of various black Si samples are presented and discussed in correlation with the surface morphology.
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页数:3
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