Direct laser writing of surface reliefs in dry, self-developing photopolymer films

被引：39

作者：

Neumann, J ^{[1
]}

Wieking, KS ^{[1
]}

Kip, D ^{[1
]}

机构：

[1] Univ Osnabruck, Fachbereich Phys, D-49069 Osnabruck, Germany

来源：

APPLIED OPTICS | 1999年 / 38卷 / 25期

关键词：

D O I：

10.1364/AO.38.005418

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

Fabrication of surface reliefs is achieved by raster scanning dry photopolymer films under a focused laser beam. The formation of the structure takes place subsequent to illumination without any chemical treatment or wet processing. Computer-generated optical elements can be recorded quickly, easily, and at low cost. The technology is particularly well suited for rapid prototyping and design purposes. These photopolymer films have potential in photonics applications, such as diffractive optical elements and waveguide structures. (C) 1999 Optical Society of America.

引用

页码：5418 / 5421

页数：4

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