Laser-ablation deposition and characterization of ferroelectric capacitors for nonvolatile memories

被引:41
作者
Auciello, O
Ramesh, R
机构
关键词
D O I
10.1557/S0883769400046054
中图分类号
T [工业技术];
学科分类号
08 ;
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[No abstract available]
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页码:31 / 36
页数:6
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  • [1] ALSHAREEF HN, 1994, NATO ASI SER, V284, P133
  • [2] CONTROL OF STRUCTURE AND ELECTRICAL-PROPERTIES OF LEAD-ZIRCONIUM-TITANATE-BASED FERROELECTRIC CAPACITORS PRODUCED USING A LAYER-BY-LAYER ION-BEAM SPUTTER-DEPOSITION TECHNIQUE
    AUCIELLO, O
    GIFFORD, KD
    KINGON, AI
    [J]. APPLIED PHYSICS LETTERS, 1994, 64 (21) : 2873 - 2875
  • [3] NEW ROTATING TARGET HOLDER FOR LASER ABLATION AND ION-BEAM SPUTTER DEPOSITION OF MULTICOMPONENT AND MULTILAYERED THIN-FILMS
    AUCIELLO, O
    EMERICK, J
    DUARTE, J
    ILLINGWORTH, A
    [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1993, 11 (01): : 267 - 270
  • [4] CHEUNG JT, 1992, 4TH P INT S INT FERR, P158
  • [5] Chrisey D. B., 1994, PULSED LASER DEPOSIT
  • [6] POLYCRYSTALLINE LA0.5SR0.5COO3 PBZR0.53TI0.47O3 LA0.5SR0.5COO3 FERROELECTRIC CAPACITORS ON PLATINIZED SILICON WITH NO POLARIZATION FATIGUE
    DAT, R
    LICHTENWALNER, DJ
    AUCIELLO, O
    KINGON, AI
    [J]. APPLIED PHYSICS LETTERS, 1994, 64 (20) : 2673 - 2675
  • [7] Dat R, 1995, INTEGR FERROELECTR, V9, P309, DOI 10.1080/10584589508219665
  • [8] Dat R., 1994, Integrated Ferroelectrics, V5, P275, DOI 10.1080/10584589408223884
  • [9] PULSED-LASER ABLATION SYNTHESIS AND CHARACTERIZATION OF LAYERED PT/SRBI2TA2O9/PT FERROELECTRIC CAPACITORS WITH PRACTICALLY NO POLARIZATION FATIGUE
    DAT, R
    LEE, JK
    AUCIELLO, O
    KINGON, AI
    [J]. APPLIED PHYSICS LETTERS, 1995, 67 (04) : 572 - 574
  • [10] DAT R, 1995, J VAC SCI TECHNOL A, V13, P1175