Finite-element Modeling of low-stress suspension structures and applications in RF MEMS parallel-plate variable capacitors

被引：15

作者：

Elshurafa, Amro M. ^{[1
]}

El-Masry, Ezz I. ^{[1
]}

机构：

[1] Dalhousie Univ, Dept Elect & Comp Engn, Halifax, NS B3J 2X4, Canada

来源：

IEEE TRANSACTIONS ON MICROWAVE THEORY AND TECHNIQUES | 2006年 / 54卷 / 05期

基金：

加拿大自然科学与工程研究理事会;

关键词：

finite-clement model (FEM); microelectromechanical systems (MEMS); multiphysics coupling; variable capacitors;

D O I：

10.1109/TMTT.2006.872787

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper presents a complete structure and model of a microelectromechanical-system variable capacitor that is able to achieve a theoretically infinite tuning range. For the first time, both stress and residual stress issues are treated simultaneously. Two capacitors were fabricated where actuation voltages of 4.5 and 9 V (that correspond to a tuning range of 3:1 and 3.4:1, respectively) were acquired. Simulation and measurements verify that the proposed variable capacitors possess higher performance and tuning ranges when compared with the same class varactors fabricated using the same process. Further, a finite-element model based on electrostatic-structural coupling is presented.

引用

页码：2211 / 2219

页数：9

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