Pt nanoparticle-doped Nb2O5 composite films (similar to80 nm thickness) have been prepared by the liquid phase deposition method. The deposited films were characterized by X-ray diffraction (XRD), high-resolution transmission electron microscopy (HRTEM), X-ray photoelectron spectroscopy (XPS) and Fourier transform infrared spectroscopy (FT-IR). Heat treatment of the deposited films above 200 degreesC under airflow produced dispersion of the Pt particles. The mean sizes of the Pt particles varied from 2 to 6 nm after heat treatment at 300-600 degreesC. All deposited films were X-ray amorphous up to 500 degreesC of heat treatment, above which a crystalline structure appeared. The crystallized composite film corresponded to the hexagonal structure of TT-Nb2O5.