Flexible Carbon Nanotube Based Gas Sensors Fabricated by Large-Scale Spray Deposition

被引：55

作者：

Abdellah, Alaa ^{[1
]}

Abdelhalim, Ahmed ^{[1
]}

Loghin, Florin ^{[1
]}

Koehler, Philipp ^{[1
]}

Ahmad, Zubair ^{[1
]}

Scarpa, Giuseppe ^{[1
]}

Lugli, Paolo ^{[1
]}

机构：

[1] Tech Univ Munich, Dept Elect Engn & Informat Technol, Inst Nanoelect, D-80333 Munich, Germany

来源：

IEEE SENSORS JOURNAL | 2013年 / 13卷 / 10期

关键词：

Solution-processing; spray deposition; CNT thin-films; flexible; gas sensor; THIN-FILMS; TRANSPARENT; AMMONIA; NH3;

D O I：

10.1109/JSEN.2013.2265775

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

080906 [电磁信息功能材料与结构]; 082806 [农业信息与电气工程];

摘要：

Carbon nanotubes (CNTs) are demonstrated as one of the most interesting materials for gas sensing. The possibility to obtain CNT thin-films via solution-processing techniques has paved the way for low-cost applications of such sensors. In this paper, we demonstrate that high performance gas sensors based on CNT thin-films can be obtained by direct spray deposition onto flexible substrates. The results obtained for NH3 sensing using CNT films deposited on polyimide show exceptionally high as well as immediate response to the test gas, with performance comparable with that obtained on oxidized silicon substrates. In addition, a good repeatability of the sensor response to defined gas concentrations is demonstrated. This represents a major step toward low-cost large-scale production of this class of devices.

引用

页码：4014 / 4021

页数：8

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