Microfabrication and characteristics of magnetic thin-film inductors in the ultrahigh frequency region

被引：141

作者：

Yamaguchi, M

Suezawa, K

Arai, KI

Takahashi, Y

Kikuchi, S

Shimada, Y

Li, WD

Tanabe, S

Ito, K

机构：

[1] Tohoku Univ, Elect Commun Res Inst, Aoba Ku, Sendai, Miyagi 9808577, Japan

[2] Tohoku Gakuin Univ, Dept Elect Engn, Tagajo, Miyagi 9858537, Japan

[3] Tohoku Univ, Sci Measurements Res Inst, Aoba Ku, Sendai, Miyagi 9808577, Japan

[4] Mitsubishi Elect Corp, Amagasaki, Hyogo 6610001, Japan

来源：

JOURNAL OF APPLIED PHYSICS | 1999年 / 85卷 / 11期

关键词：

D O I：

10.1063/1.370608

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Thin-film inductors for 1 GHz-drive mobile communication handset application has been demonstrated. This is the possible practical application of soft magnetic films in 1 GHz range. Fe61Al13O26 with M-s = 1.2 T, rho = 500 mu Omega cm, f(r) = 2 GHz were used for the inductors. L = 7.6 nH, R = 6.5 Omega, and Q = 7.4 were obtained at 1 GHz in a 370 mu m x 370 mu m square four turn spiral of line/space = 11 mu m/11 mu m covered with 0.1-mu m-thick slitted Fe61Al13O26 film with Cr underlayer. The L was increased over the flux saturated inductor by 8.6% without any degrade of quality factor. (C) 1999 American Institute of Physics. [S0021-8979(99)05811-9].

引用

页码：7919 / 7922

页数：4

共 11 条

[1] Multilevel-spiral inductors using VLSI interconnect technology [J].