Microstructure and texture evolution in oxide films prepared by ion-beam assisted laser deposition

被引：16

作者：

Holzapfel, B ^{[1
]}

Betz, V ^{[1
]}

Schläfer, D ^{[1
]}

Bauer, HD ^{[1
]}

Schultz, L ^{[1
]}

机构：

[1] IFW Dresden, D-01171 Dresden, Germany

来源：

IEEE TRANSACTIONS ON APPLIED SUPERCONDUCTIVITY | 1999年 / 9卷 / 02期

关键词：

D O I：

10.1109/77.784672

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

oriented films of Yttria stabilized Zirconia were deposited on polycrystalline and amorphous substrates. The film texture in dependence of deposition parameters was examined with X-ray texture analysis, As deposited films were analyzed by transmission electron microscopy and atomic force microscopy, All films showed a columnar film growth structure. The diameter of the columns increased with film thickness and could be related to the Sim in-plane orientation. The nucleation process was found to be polycrystalline and independent of the ion-beam assistance. At an early growth stage, a growth structure of (001) oriented columns emerges from the randomly oriented crystallites. The film in-plane texture forms in a competition of (001) oriented columns, where columns oriented with their (111) axis parallel to the impinging ion-beam dominate the film texture. The out-of plane growth orientation was found to depend on substrate temperature and laser energy density, while the ion-beam affects mainly the in-plane orientation.

引用

页码：1479 / 1482

页数：4

共 17 条

[1] Growth of biaxially aligned buffer layers for YBCO tapes by ion-beam assisted laser deposition and in situ RHEED texture analysis [J].