Extrapolation of critical thickness of GaN thin films from lattice constant data using synchrotron X-ray

被引:2
作者
Kim, C
Robinson, IK
Myoung, J
Shim, K
Kim, K
Yoo, MC
机构
来源
III-NITRIDE, SIC AND DIAMOND MATERIALS FOR ELECTRONIC DEVICES | 1996年 / 423卷
关键词
D O I
10.1557/PROC-423-557
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
In some materials, Van der Merwe's equilibrium theory of strain relief is believed to explain the sudden transition from pseudomorphic growth of a thin film to a progressively relaxed state. We show, for the first time for GaN, how an accurate estimate of the critical thickness of a thin film can be extrapolated from suitable measurements of lattice constants as a function of film thickness using synchrotron X-ray. We do this both for an elementary elastic energy function in which the interactions between the dislocations are ignored, and for a more realistic energy estimate due to Kasper. The method is found to work quantitatively for thin films of GaN on AW. The critical thickness is determined to be 29+/-4 Angstrom.
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页码:557 / 561
页数:5
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