On the modelling of semi-insulating GaAs including surface tension and bulk stresses

被引:7
作者
Dreyer, Wolfgang [1 ]
Duderstadt, Frank [1 ]
机构
[1] Weierstrass Inst Appl Anal & Stochast, D-10117 Berlin, Germany
来源
PROCEEDINGS OF THE ROYAL SOCIETY A-MATHEMATICAL PHYSICAL AND ENGINEERING SCIENCES | 2008年 / 464卷 / 2098期
关键词
phase transitions; phase diagrams; surface tension; deviatoric stress; chemical potentials; GaAs;
D O I
10.1098/rspa.2007.0205
中图分类号
O [数理科学和化学]; P [天文学、地球科学]; Q [生物科学]; N [自然科学总论];
学科分类号
07 ; 0710 ; 09 ;
摘要
The necessary heat treatment of single-crystal semi-insulating gallium arsenide (GaAs), which is deployed in micro- and optoelectronic devices, generates undesirable liquid precipitates in the solid phase. The appearance of precipitates is influenced by surface tension at the liquid solid interface and deviatoric stresses in the solid. The central quantity for the description of the various aspects of phase transitions is the chemical potential, which can be additively decomposed into a chemical and a mechanical part. In particular, the calculation of the mechanical part of the chemical potential is of crucial importance. We determine the chemical potential in the framework of the St. Venant Kirchhoff law, which gives an appropriate stress strain relation for many solids in the small-strain regime. We establish criteria that allow the correct replacement of the St. Venant Kirchhoff law by the simpler Hooke law. The main objectives of this study are the following: (i) we develop a thermomechanical model that describes diffusion and interface motions, which are both strongly influenced by surface tension effects and deviatoric stresses, (ii) we give an overview and outlook on problems that can be posed and solved within the framework of the model, and (iii) we calculate non-standard phase diagrams for GaAs above 1059 K, i.e. those that take into account surface tension and deviatoric stresses, and we compare the results with classical phase diagrams without these phenomena.
引用
收藏
页码:2693 / 2720
页数:28
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