Fabrication of true 3D microstructures in glass/ceramic materials by pulsed UV laser volumetric exposure techniques

被引：38

作者：

Fuqua, P ^{[1
]}

Janson, SW ^{[1
]}

Hansen, WW ^{[1
]}

Helvajian, H ^{[1
]}

机构：

[1] Aerospace Corp, Microtechnol Ctr, Los Angeles, CA 90009 USA

来源：

LASER APPLICATIONS IN MICROELECTRONIC AND OPTOELECTRONIC MANUFACTURING IV | 1999年 / 3618卷

关键词：

MEMS; nanosatellite; laser micromachining; glass-ceramics; direct-write;

D O I：

10.1117/12.352714

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A pulsed UV laser based technique has been developed which permits the transfer, by direct-write exposure, of 3D images into a photosensitive glass/ceramic material. The exposed latent image volume is developed via temperature programmed bake process and then etched away using HF in solution. The height of the 3D microstructures is controlled by the initial laser wavelength used during the exposure and the time duration of the etching cycle. Using this technique we have fabricated large arrays of microstructures which have applications to microfluidics, microelectromechanical systems and optoelectronics. The resulting master copy can be used either as is or by use standard injection molding techniques converted into a metallic or plastic copies (i.e. LIGA). We present these results and others which have specific applications to miniature 1Kg class satellites - nanosatellites.

引用

页码：213 / 220

页数：8