Compositional dependence of optical constants and microstructures of GeSbTe thin films for compact-disc-rewritable (CD-RW) readable with conventional CD-ROM drives

被引：22

作者：

Kato, N ^{[1
]}

Takeda, Y

Fukano, T

Motohiro, T

Kawai, S

Kuno, H

机构：

[1] Toyota Cent Res & Dev Labs Inc, Nagakute, Aichi 4801192, Japan

[2] Denso Corp, Kariya, Aichi 4488661, Japan

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1999年 / 38卷 / 3B期

关键词：

phase-change; CD-RW; Ge39Sb10Te51; crystalline grain; optical constant; interference layer;

D O I：

10.1143/JJAP.38.1707

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

We studied the dependence of optical constants and microstructures of (GeTe)(x)(Sb2Te3)(1-x) films on composition to determine the optimal composition of phase change recording materials. The maximal differences in optical constants between crystalline and amorphous phases and the minimal crystalline grain sizes of the films were obtained at Ge39Sb10Te51. Using Ge39Sb10Te51 as a recording layer and TiO2 and SiO2 as interference layers, a compact disc rewritable (CD-RW) with 65% reflectivity and 60% modulation was obtained.

引用

页码：1707 / 1708

页数：2