Dynamical analysis and control of microcantilevers

被引：149

作者：

Ashhab, M

Salapaka, MV

Dahleh, M ^{[1
]}

Mezic, I

机构：

[1] Univ Calif Santa Barbara, Dept Mech Engn, Santa Barbara, CA 93106 USA

[2] Iowa State Univ, Dept Elect Engn, Ames, IA 50011 USA

来源：

AUTOMATICA | 1999年 / 35卷 / 10期

基金：

美国国家科学基金会;

关键词：

atomic force microscopy; chaotic behavior; Melnikov method; microcantilevers;

D O I：

10.1016/S0005-1098(99)00077-1

中图分类号：

TP [自动化技术、计算机技术];

学科分类号：

0812 ;

摘要：

In this paper, we study the dynamical behavior of a microcantilever-sample system that forms the basis for the operation of atomic force microscopes (AFM). We model the microcantilever by a single mode approximation and the interaction between the sample and cantilever by a van der Waals (vdW) potential. The cantilever is vibrated by a sinusoidal input, and its deflection is detected optically. We analyze the forced dynamics using Melnikov method, which reveals the region in the space of physical parameters where chaotic motion is possible. In addition, using a proportional and derivative controller we compute the Melnikov function in terms of the parameters of the controller. Using this relation it is possible to design controllers that will remove the possibility of chaos. (C) 1999 Elsevier Science Ltd. All rights reserved.

引用

页码：1663 / 1670

页数：8