Enhanced secondary electron yield from oxidized regions on amorphous carbon films studied by x-ray spectromicroscopy

被引：18

作者：

Díaz, J

Anders, S

Cossy-Favre, A

Samant, M

Stöhr, J

机构：

[1] Univ Calif Berkeley, Lawrence Berkeley Lab, Adv Light Source, Berkeley, CA 94720 USA

[2] IBM Corp, Almaden Res Ctr, Div Res, San Jose, CA 95120 USA

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1999年 / 17卷 / 05期

关键词：

D O I：

10.1116/1.581938

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

Photoemission electron spectromicroscopy with synchrotron radiation has been used to study the correlation between the chemical surface composition and secondary electron yield from the surface of amorphous carbon films. Regions of about 4 mu m diam were found which exhibited up to ten times higher secondary electron emission than the rest of the film. Near edge x-ray absorption fine structure spectroscopy of these regions showed that they contained highly oxidized carbon in the form of carboxylic and carbonate groups. These observations might be linked to the field emission properties of these films. (C) 1999 American Vacuum Society. [S0734-2101(99)02605-6].

引用

页码：2737 / 2740

页数：4

共 28 条

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[2]

ANDERS S, 1997, APPL PHYS LETT, V71, P551

[3] Enhancement on field emission characteristics of pulsed laser deposited diamondlike carbon films using Au precoatings [J].