Simulation of yield/cost learning curves with Y4

This paper describes a prototype of a discrete event simulator-Y4 (yield Forecaster)-capable of simulating defect related yield loss and manufacturing cost as a function of time, for a multiproduct IC manufacturing line, The methodology of estimating yield and cost is based on mimicking the operation and characteristics of a manufacturing line in the time domain, The paper presents a set of models that take into account the effect of particles introduced during wafer processing as well as changes in their densities due to process improvements, These models also illustrate a possible way of accounting for the primary attributes of fabrication, product, and failure analysis which affect yield learning, A spectrum of results are presented for a manufacturing scenario to demonstrate the usefulness of the simulator in formulating IC manufacturing strategies.