Electron emission characteristics of diamond like carbon films deposited by laser ablation technique

被引：10

作者：

Park, C ^{[1
]}

Park, H ^{[1
]}

Hong, YK ^{[1
]}

Kim, JS ^{[1
]}

Kim, JK ^{[1
]}

机构：

[1] AGCY DEF DEV,TAEJON 305600,SOUTH KOREA

来源：

APPLIED SURFACE SCIENCE | 1997年 / 111卷

关键词：

diamond-like carbon film; pulsed laser ablation; AFM; electron emission;

D O I：

10.1016/S0169-4332(96)00712-X

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

Diamond like carbon (DLC) films are deposited on silicon substrates by the pulsed laser ablation technique. The surface morphology of the DLC film, studied by atomic force microscopy (AFM), shows a strong dependence on the power densities of the laser pulses. The degree of diamond-like propel-ties of the films, which were studied using Raman spectroscopy and Auger electron spectroscopy, shows close correlation with the surface morphology. Electron emission characteristics of the films are measured and their correlations with the surface morphology and bonding structure are investigated. Variation of these structural and electron emission characteristics of the films on the deposition conditions such as substrate temperature and flow rate of atomic hydrogen during the process of laser ablation is also studied.

引用

页码：140 / 144

页数：5

共 5 条

[1]

COLLINS CB, 1992, AM CERAM SOC BULL, V71, P1535

[2] QUANTUM PHOTOYIELD OF DIAMOND(111) - STABLE NEGATIVE-AFFINITY EMITTER [J].