Lattice-Boltzmann simulations of fluid flows in MEMS

被引:473
作者
Nie, XB
Doolen, GD
Chen, SY [1 ]
机构
[1] Johns Hopkins Univ, Dept Mech Engn, Baltimore, MD 21218 USA
[2] Los Alamos Natl Lab, Ctr Nonlinear Studies, Los Alamos, NM 87545 USA
[3] Los Alamos Natl Lab, Div Theoret, Los Alamos, NM 87545 USA
[4] Peking Univ, Natl Key Lab Turbulence Res, Beijing, Peoples R China
关键词
Lattice-Boltzmann; microfluid; velocity slip;
D O I
10.1023/A:1014523007427
中图分类号
O4 [物理学];
学科分类号
0702 [物理学];
摘要
The lattice Boltzmann model is a simplified kinetic method based on the particle distribution function. We use this method to simulate problems in MEMS, in which the velocity slip near the wall plays an important role. It is demonstrated that the lattice Boltzmann method can capture the fundamental behaviors in micro-channel flow, including velocity slip, nonlinear pressure drop along the channel and mass flow rate variation with Knudsen number, The Knudsen number dependence of the position of the vortex center and the pressure contour in micro-cavity flows is also demonstrated.
引用
收藏
页码:279 / 289
页数:11
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