Polynomial approximation of SAW reflection characteristics for fast device simulation tools

被引：6

作者：

Ibata, K ^{[1
]}

Omori, T ^{[1
]}

Hashimoto, KY ^{[1
]}

Yamaguchi, M ^{[1
]}

机构：

[1] Chiba Univ, Dept Elect & Mech Engn, Inage Ku, Chiba 263, Japan

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1999年 / 38卷 / 5B期

关键词：

COM; polynomial approximation; reflection; SAW;

D O I：

10.1143/JJAP.38.3293

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

The paper deals with the derivation of simple polynomials characterising surface acoustic wave (SAW) reflection by metallic gratings with various widths and thicknesses. Such polynomial approximation makes it possible to estimate coupling of mode (COM) parameters in markedly reduced computational time. For very sophisticated SAW devices, this is of great use to develop high-speed simulation and design tools based on the COM method. In the present study, it is shown how simply and accurately the SAW reflection by aluminium gratings on 128 degrees YX-LiNbO3 substrates or 36 degrees YX-LiTaO3 substrates is characterised by polynomial approximation.

引用

页码：3293 / 3296

页数：4

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