Ion charge state distributions of vacuum arc plasmas: The origin of species

被引:282
作者
Anders, A
机构
[1] Ernest O. Lawrence Berkeley National Laboratory, University of California, Berkeley, CA
关键词
D O I
10.1103/PhysRevE.55.969
中图分类号
O35 [流体力学]; O53 [等离子体物理学];
学科分类号
070204 ; 080103 ; 080704 ;
摘要
Vacuum are plasmas are produced at micrometer-size, nonstationary cathode spots. Ion charge state distributions (CSD's) are experimentally known for 50 elements, but the theoretical understanding is unsatisfactory. In this paper, CSD's of vacuum are plasmas are calculated under the assumption that the spot plasma experiences an instantaneous transition from equilibrium to nonequilibrium while expanding. Observable charge state distributions are the result of a freezing process at this transition. ''Frozen'' CSD's have been calculated using Saha equations in the Debye-Huckel approximation of the nonideal plasma for all metals of the Periodic Table and for boron, carbon, silicon, and germanium. The results are presented in a ''periodic table of CSD.'' The table contains also the mean ion charge state, the neutral vapor fraction, and the effective plasma temperature and density at the freezing point for each element. The validity of the concepts of ''instantaneous freezing'' and ''effective temperature and density'' is discussed for low and high currents and for the presence of a magnetic field. Temperature fluctuations have been identified to cause broadening of CSD's.
引用
收藏
页码:969 / 981
页数:13
相关论文
共 62 条
[1]   High ion charge states in a high-current, short-pulse, vacuum arc ion source [J].
Anders, A ;
Brown, I ;
MacGill, R ;
Dickinson, M .
REVIEW OF SCIENTIFIC INSTRUMENTS, 1996, 67 (03) :1202-1204
[2]   EFFECT OF DUCT BIAS ON TRANSPORT OF VACUUM-ARC PLASMAS THROUGH CURVED MAGNETIC FILTERS [J].
ANDERS, A ;
ANDERS, S ;
BROWN, IG .
JOURNAL OF APPLIED PHYSICS, 1994, 75 (10) :4900-4905
[3]   TIME-DEPENDENCE OF VACUUM-ARC PARAMETERS [J].
ANDERS, A ;
ANDERS, S ;
JUTTNER, B ;
BROWN, IG .
IEEE TRANSACTIONS ON PLASMA SCIENCE, 1993, 21 (03) :305-311
[4]   VALIDITY-CONDITIONS FOR COMPLETE AND PARTIAL LOCAL THERMODYNAMIC-EQUILIBRIUM OF NONHYDROGENIC LEVEL SYSTEMS AND THEIR APPLICATION TO COPPER VAPOR ARCS IN VACUUM [J].
ANDERS, A ;
ANDERS, S ;
HANTZSCHE, E .
IEEE TRANSACTIONS ON PLASMA SCIENCE, 1989, 17 (05) :653-656
[5]   PULSED DYE-LASER DIAGNOSTICS OF VACUUM-ARC CATHODE SPOTS [J].
ANDERS, A ;
ANDERS, S ;
JUTTNER, B ;
BOTTICHER, W ;
LUCK, H ;
SCHRODER, G .
IEEE TRANSACTIONS ON PLASMA SCIENCE, 1992, 20 (04) :466-472
[6]  
ANDERS A, 1996, P 17 INT S DISCH EL
[7]  
ANDERS A, 1990, FORMULARY PLASMA PHY
[8]   Pressure ionization: its role in metal vapour vacuum arc plasmas and ion sources [J].
Anders, Andre ;
Anders, Simone ;
Foerster, Andreas ;
Brown, Ian G. .
PLASMA SOURCES SCIENCE & TECHNOLOGY, 1992, 1 (04) :263-270
[9]   ON THE MACROPARTICLE FLUX FROM VACUUM-ARC CATHODE SPOTS [J].
ANDERS, S ;
ANDERS, A ;
YU, KM ;
YAO, XY ;
BROWN, IG .
IEEE TRANSACTIONS ON PLASMA SCIENCE, 1993, 21 (05) :440-446
[10]   FROZEN STATE OF IONIZATION IN A CATHODIC PLASMA-JET OF A VACUUM-ARC [J].
ANDERS, S ;
ANDERS, A .
JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1988, 21 (01) :213-215