Kerf-Less Removal of Si, Ge, and III-V Layers by Controlled Spalling to Enable Low-Cost PV Technologies

被引:146
作者
Bedell, Stephen W. [1 ]
Shahrjerdi, Davood [1 ]
Hekmatshoar, Bahman [1 ]
Fogel, Keith [1 ]
Lauro, Paul A. [1 ]
Ott, John A. [1 ]
Sosa, Norma [1 ]
Sadana, Devendra [1 ]
机构
[1] IBM Corp, Thomas J Watson Res Ctr, Yorktown Hts, NY 10598 USA
来源
IEEE JOURNAL OF PHOTOVOLTAICS | 2012年 / 2卷 / 02期
关键词
Flexible photovoltaic (PV); kerf-free; layer transfer; substrate reuse; LIFT-OFF; CRACKING; FILMS; SILICON;
D O I
10.1109/JPHOTOV.2012.2184267
中图分类号
TE [石油、天然气工业]; TK [能源与动力工程];
学科分类号
0807 ; 0820 ;
摘要
Kerf-less removal of surface layers of photovoltaic materials including silicon, germanium, and III-Vs is demonstrated by controlled spalling technology. The method is extremely simple, versatile, and applicable to a wide range of substrates. Controlled spalling technology requires a stressor layer, such as Ni, to be deposited on the surface of a brittle material, and the controlled removal of a continuous surface layer could be performed at a predetermined depth by manipulating the thickness and stress of the Ni layer. Because the entire process is at room temperature, this technique can be applied to kerf-free ingot dicing, removal of preformed p-n junctions or epitaxial layers, or even completed devices. We successfully demonstrate kerf-free ingot dicing, as well as the removal of III-V single-junction epitaxial layers from a Ge substrate. Solar cells formed on the spalled and transferred single-junction layers showed similar characteristics to nonspalled (bulk) cells, indicating that the quality of the epitaxial layers is not compromised as a result of spalling.
引用
收藏
页码:141 / 147
页数:7
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