Smooth discrete track media fabricated by focused ion beam

被引：27

作者：

Pang, BSH ^{[1
]}

Chen, YJ ^{[1
]}

Leong, SH ^{[1
]}

机构：

[1] Data Storage Inst, Singapore 117608, Singapore

来源：

APPLIED PHYSICS LETTERS | 2006年 / 88卷 / 09期

关键词：

D O I：

10.1063/1.2169851

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

We have successfully fabricated discrete track media reproducibly using the focused ion beam (FIB). 1 pA and 10 pA FIB beam currents were used effectively for discrete track fabrication; at Ga+ doses of similar to 4.2x10(16) ions/cm(2) and below, media magnetic properties are effectively suppressed, whilst damage to the morphology was minimal. Larger land/groove magnetic contrast was achieved through increasing the ion bombardment rates within this range. Beyond this dosage range, magnetic suppression leveled out, and physical grooves were etched in the media.

引用

收藏

页数：3

相关论文

共 15 条

[1] Writing of high-density patterned perpendicular media with a conventional longitudinal recording head [J].

Albrecht, M ;

Moser, A ;

Rettner, CT ;

Anders, S ;

Thomson, T ;

Terris, BD .

APPLIED PHYSICS LETTERS, 2002, 80 (18) :3409-3411

[2] Planar patterned magnetic media obtained by ion irradiation [J].

Chappert, C ;

Bernas, H ;

Ferré, J ;

Kottler, V ;

Jamet, JP ;

Chen, Y ;

Cambril, E ;

Devolder, T ;

Rousseaux, F ;

Mathet, V ;

Launois, H .

SCIENCE, 1998, 280 (5371) :1919-1922

[3] Recording performance of discrete track patterned media fabricated by focused ion beam [J].

Chen, YJ ;

Ng, KW ;

Leong, SH ;

Guo, ZB ;

Shi, JZ ;

Liu, B .

IEEE TRANSACTIONS ON MAGNETICS, 2005, 41 (06) :2195-2198

[4] Micromagnetic modeling of discrete patterned perpendicular media [J].

Hatatani, S ;

Kaizu, A ;

Sato, I .

IEEE TRANSACTIONS ON MAGNETICS, 2003, 39 (05) :2326-2328

[5] Writing and reading perpendicular magnetic recording media patterned by a focused ion beam [J].

Lohau, J ;

Moser, A ;

Rettner, CT ;

Best, ME ;

Terris, BD .

APPLIED PHYSICS LETTERS, 2001, 78 (07) :990-992

[6] High anisotropy CoCrPt(B) media for perpendicular magnetic recording [J].

Lu, B ;

Weller, D ;

Sunder, A ;

Ju, GP ;

Wu, XW ;

Brockie, R ;

Nolan, T ;

Brucker, C ;

Ranjan, R .

JOURNAL OF APPLIED PHYSICS, 2003, 93 (10) :6751-6753

[7] Measurement of Ga implantation profiles in the sidewall and bottom of focused-ion-beam-etched structures [J].

Park, CM ;

Bain, JA ;

Clinton, TW ;

van der Heijden, PAA ;

Klemmer, TJ .

APPLIED PHYSICS LETTERS, 2004, 84 (17) :3331-3333

[8] Patterned magnetic recording media [J].

Ross, C .

ANNUAL REVIEW OF MATERIALS RESEARCH, 2001, 31 :203-235

[9] Ku2 magnetic anisotropy term of CoPtCr-SiO2 media for high density recording -: art. no. 10N111 [J].

Shimatsu, T ;

Sato, H ;

Mitsuzuka, K ;

Oikawa, T ;

Inaba, Y ;

Aoi, H ;

Muraoka, H ;

Nakamura, Y .

JOURNAL OF APPLIED PHYSICS, 2005, 97 (10)

[10] Feasibility of discrete track perpendicular media for high track density recording [J].

Soeno, Y ;

Moriya, M ;

Ito, K ;

Hattori, K ;

Kaizu, A ;

Aoyama, T ;

Matsuzaki, M ;

Sakai, H .

IEEE TRANSACTIONS ON MAGNETICS, 2003, 39 (04) :1967-1971