Study of ZrO2/Al2O3 multilayers

被引：34

作者：

Gao, PT ^{[1
]}

Meng, LJ

dos Santos, MP

Teixeira, V

Andritschky, M

机构：

[1] Univ Minho, Dept Fis, P-4710 Braga, Portugal

[2] Inst Super Engn Porto, Dept Fis, P-4200 Oporto, Portugal

来源：

VACUUM | 2002年 / 64卷 / 3-4期

关键词：

D O I：

10.1016/S0042-207X(01)00311-6

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

In the present work we present a study of ZrO2/Al2O3 multilayers prepared by DC reactive sputtering with different ZrO2 layer thicknesses. To test their thermal stability, the multilayers were annealed at high temperature. A possible reason for the tetragonal phase to be stabilised in the multilayers is discussed. X-ray diffraction and Raman spectroscopy have been used to characterise the structure and the residual stress of the multilayers. (C) 2002 Elsevier Science Ltd. All rights reserved.

引用

收藏

页码：267 / 273

页数：7

相关论文

共 19 条

[1] Protective oxide coatings for superconducting YBa2Cu3O7-x thin films [J].

Aguiar, R ;

Sanchez, F ;

Ferrater, C ;

Varela, M .

THIN SOLID FILMS, 1997, 306 (01) :74-77

[2] Thermodynamics of tetragonal zirconia formation in a nanolaminate film [J].

Aita, CR ;

Wiggins, MD ;

Whig, R ;

Scanlan, CM ;

GajdardziskaJosifovska, M .

JOURNAL OF APPLIED PHYSICS, 1996, 79 (02) :1176-1178

[3] Plasma-sprayed ZrO2 thermal barrier coatings doped with an appropriate amount of SiO2 [J].

Chen, HC ;

Pfender, E ;

Heberlein, J .

THIN SOLID FILMS, 1998, 315 (1-2) :159-169

[4]

Cullity BD, 1978, ELEMENTS XRAY DIFFRA

[5] STABILIZATION OF TETRAGONAL STRUCTURE IN ZIRCONIA MICROCRYSTALS [J].

GARVIE, RC .

JOURNAL OF PHYSICAL CHEMISTRY, 1978, 82 (02) :218-224

[6] OCCURRENCE OF METASTABLE TETRAGONAL ZIRCONIA AS A CRYSTALLITE SIZE EFFECT [J].

GARVIE, RC .

JOURNAL OF PHYSICAL CHEMISTRY, 1965, 69 (04) :1238-&

[7] Adhesive and corrosion-resistant zirconium oxide coatings on stainless steel prepared by ion beam assisted deposition [J].

Hasuyama, H ;

Shima, Y ;

Baba, K ;

Wolf, GK ;

Martin, H ;

Stippich, F .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1997, 127 :827-831

[8] Structural and electrical properties of yttria-stabilized zirconia films with controlled Y content heteroepitaxially grown on Si by reactive sputtering [J].

Horita, S ;

Watanabe, M ;

Masuda, A .

MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY, 1998, 54 (1-2) :79-83

[9]

KIM ET, 1993, THIN SOLID FILMS, V277, P7

[10] DEPOSITION AND STRUCTURAL CHARACTERIZATION OF ZRO2 AND YTTRIA-STABILIZED ZRO2 FILMS BY CHEMICAL-VAPOR-DEPOSITION [J].

KIM, JS ;

MARZOUK, HA ;

REUCROFT, PJ .

THIN SOLID FILMS, 1995, 254 (1-2) :33-38