Standing-wave transform spectrometer based on integrated MEMS mirror and thin-film photodetector

被引：46

作者：

Kung, HL ^{[1
]}

Bhalotra, SR

Mansell, JD

Miller, DAB

Harris, JS

机构：

[1] Stanford Univ, EL Ginzton Lab, Dept Elect Engn, Stanford, CA 94305 USA

[2] Stanford Univ, EL Ginzton Lab, Dept Appl Phys, Stanford, CA 94305 USA

[3] Stanford Univ, Solid State & Photon Lab, Dept Appl Phys, Stanford, CA 94305 USA

[4] Stanford Univ, Solid State & Photon Lab, Dept Elect Engn, Stanford, CA 94305 USA

来源：

IEEE JOURNAL OF SELECTED TOPICS IN QUANTUM ELECTRONICS | 2002年 / 8卷 / 01期

关键词：

Fourier transform spectrometers; microelectromechanical devices; microsensors; spectral analysis; spectroscopy; wavelength measurement;

D O I：

10.1109/2944.991404

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

In this paper, we report a novel, miniature Fourier transform spectrometer with a linear architecture that works by sampling a standing wave. The spectrometer consists of an electrostatically actuated microelectromechanical mirror with on-resonance displacement of up to 65 mum, a thin-film photodetector, and an electrical back plane for actuating the mirror. The integrated device offers mirror stability and fixed relative alignment of the three components. The spectrometer has better than 32-nm resolution at 633 nm.

引用

页码：98 / 105

页数：8

共 15 条

[1]

BHALOTA SR, 2001, P C FOUR TRANSF SPEC

[2]

BHALOTRA SR, 2000, P INT C OPT MEMS, P3

[3] REAL-TIME FILTERING OF DATA FROM MOBILE, PASSIVE REMOTE INFRARED-SENSORS WITH PRINCIPAL COMPONENT MODELS OF BACKGROUND [J].

BROWN, SD .

JOURNAL OF CHEMOMETRICS, 1991, 5 (03) :147-161

[4]

CHAMBERLAIN J, 1979, PRINCIPLES INTERFERO, P216

[5] Single-chip CMOS optical microspectrometer [J].

Correia, JH ;

de Graaf, G ;

Kong, SH ;

Bartek, M ;

Wolffenbuttel, RF .

SENSORS AND ACTUATORS A-PHYSICAL, 2000, 82 (1-3) :191-197

[6] Wavelength monitor based on two single-quantum-well absorbers sampling a standing wave pattern [J].

Kung, HL ;

Miller, DAB ;

Atanackovic, P ;

Lin, CC ;

Harris, JS ;

Carraresi, L ;

Cunningham, JE ;

Jan, WY .

APPLIED PHYSICS LETTERS, 2000, 76 (22) :3185-3187

[7]

KUNG HL, 2000, P INT C OPT MEMS, P19

[8]

Macleod H.A., 1989, THIN FILM OPTICAL FI, P32

[9] Miniaturized time-scanning Fourier transform spectrometer based on silicon technology [J].

Manzardo, O ;

Herzig, HP ;

Marxer, CR ;

de Rooij, NF .

OPTICS LETTERS, 1999, 24 (23) :1705-1707

[10] Near infrared wavemeter based on an array of polycrystalline Ge on Si photodetectors [J].

Masini, G ;

Colace, L ;

Assanto, G .

SILICON-BASED OPTOELECTRONICS II, 2000, 3953 :88-94

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