Selective electroless plating to fabricate complex three-dimensional metallic micro/nanostructures

被引：91

作者：

Formanek, F ^{[1
]}

Takeyasu, N

Tanaka, T

Chiyoda, K

Ishikawa, A

Kawata, S

机构：

[1] RIKEN, Inst Phys & Chem Res, Nanophys Lab, Wako, Saitama 3510198, Japan

[2] RIKEN, Nanophoton Lab, Wako, Saitama 3510198, Japan

[3] Gakushuin Univ, Dept Phys, Toshima Ku, Tokyo 1718588, Japan

[4] Osaka Univ, Dept Appl Phys, Suita, Osaka 5650871, Japan

来源：

APPLIED PHYSICS LETTERS | 2006年 / 88卷 / 08期

基金：

日本学术振兴会;

关键词：

D O I：

10.1063/1.2178261

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

We report on selective metal deposition over complex polymer structures formed by two-photon induced photopolymerization technique. Periodic three-dimensional micro/nanostructures are fabricated by means of a microlens array to produce multiple spots from a single-beam femtosecond laser. An electroless plating method is used to deposit a thin silver film onto the sample surface. The glass slide surface supporting the structures is chemically modified to avoid silver coating of the substrate. Our technique enables to produce complex metallic structures with arbitrary shapes under ambient conditions. (c) 2006 American Institute of Physics.

引用

页数：3

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