Microgrippers fabricated by the LIGA technique

被引：38

作者：

Ballandras, S

Basrour, S

Robert, L

Megtert, S

Blind, P

Rouillay, M

Bernede, P

Daniau, W

机构：

[1] UNIV PARIS 11,LURE,F-91405 ORSAY,FRANCE

[2] CETEHOR,F-25000 BESANCON,FRANCE

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 1997年 / 58卷 / 03期

关键词：

microgrippers; LIGA; finite-element analysis; mechanical properties; characterization;

D O I：

10.1016/S0924-4247(97)01396-4

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A study devoted to the design and fabrication of microgrippers using the LIGA technique is described in this paper. The design method is presented and validated by the use of finite-element analysis. Technological topics are detailed to illustrate the fabrication process. Also, experimental data concerning the mechanical behaviour of one of the microgrippers are reported. These data are used to improve the previous finite-element analysis. Finally, a comparison between experiments and theoretical predictions is discussed.

引用

页码：265 / 272

页数：8

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